Bories M, Polzin J-I, Steinhauser B, Bivour M, Benick J, Hermle M, et al. Plasma-Assisted N2O Oxidation (PANO) in an Industrial Direct Plasma Reactor for TOPCon Production. SiliconPV Conf Proc [Internet]. 2024 Feb. 22 [cited 2024 Dec. 22];1. Available from: https://www.tib-op.org/ojs/index.php/siliconpv/article/view/838