Bories, Mathias, Jana-Isabelle Polzin, Bernd Steinhauser, Martin Bivour, Jan Benick, Martin Hermle, and Stefan Glunz. 2024. “Plasma-Assisted N2O Oxidation (PANO) in an Industrial Direct Plasma Reactor for TOPCon Production”. SiliconPV Conference Proceedings 1 (February). https://doi.org/10.52825/siliconpv.v1i.838.